I want to know by which kind of instrument i can print or drill design which from CAD to make my channel on transparency mask to build microfluidic (Diameter of channel will be 0.1um-100um) chip?
Dear sarpras it would be best if you let us know what is the substrate you will be using. Also even for mask design ppl are using non conventional technique such as photolithography. This is because generally lab on chip substrates are polymers and they interact with uv light uniquely producing feature in the range of 0-100 micron almost perfect.
The printing will be on transparency mask and it will be then placed on SU-8 photoresist and subjected to UV light for at least 1 hour and printing range of 0.1-100 micron.
If I understand your question correctly, you need to print the transparency mask. In this case, you can use a company like CAD Art in the USA who are very efficient and can print to a high resolution (I think around 25 000 dpi, which will give you about a 10um feature size on the transparency). For smaller than 10um, I think you will need to look at chrome masks which are a lot more expensive and not required unless you really need the small feature sizes.