In Silvaco Atlas TCAD, you can dope a region with carbon by defining a carbon impurity profile in the input file. The syntax for this would depend on the specific file format you are using (e.g., deck, MSDX, etc.). Here is an example of the syntax for doping a region with carbon in a deck file:
*Region definition
REGION
...
CARBON 1.0e20
...
END
In this example, the CARBON keyword is used to specify the doping concentration of carbon in the region, which is set to 1.0e20 cm^-3. The REGION and END keywords are used to define the beginning and end of the region definition, respectively. The dots (...) represent other parameters or regions that may be present in your input file.
Note that the doping concentration and other parameters may need to be adjusted based on your specific device requirements and simulation setup. Additionally, you may need to add additional keywords or parameters to specify the distribution and type of doping. Please refer to the Silvaco Atlas TCAD user manual for more information on the syntax and usage of these keywords.