Hi,

i am using electron beam evaporator to make 100 nm gold thin films. i am using 5 nm Ti as a adhesion layer on prime grade SiO2/Si substrate. Recently, I started to face the problem that evaporated gold film is full of black dots. We changed the gold crucible but it didn’t help. Anyone who faced suh a problem before or any suggestions to completely remove these black dots? The films are prepared at a pressure of 1.2e-6 mbar. Rates of evaporation for Ti and Au are 0.2 and 0.8 angstrom per second.