To have an idea of the penetration depth in your sample you can use the classical formula of Kanaya Okayama (you can search it on google)

Yusnizam Yusuf,

Marcella Bini provided a great answer. In addition to a raw calculation, you can use a Monte Carlo simulation software to determine the electron trajectories as well as the X-ray escape volume associated with your experimental conditions. I've personally used the open source NIST DTSA-II with multiple different materials to obtain escape volumes. I've included the link below.

https://www.nist.gov/services-resources/software/nist-dtsa-ii

Good luck and I hope this helps!

Dear Yusnizam Yusuf ,

sorry for being a bit late...

Unfortunately the above answers refer to electron excitation; but you asked for x-rays.

You know, that x-rays have a spectrum reaching up to n*keV photon energies when applying a tube voltage of n*kV.

So for your 10kV tube voltage the spectral distribution of the x-rays reaches up to 10keV.

Thus you will not have a single number as answer of your question.

The mean penetration depth (1/e) is the inverse of the linear x-ray attenuation coeffcient µ(E), which unfortunately here depends on the x-ray photon energy E; µ=µ(E).

The energy dependence of µ can be for example taken from the NIST/XCOM database:

https://physics.nist.gov/PhysRefData/Xcom/html/xcom1.html

via the x-ray mass-attenuation coefficients µ/rho, which will be provided there.

Just multiply the results (µ/rho) with the density rho of your material (rho(AlN) ~ 3,26g/cm3) to get µ and proceed furtheron to 1/µ

In the attachment I have already listed the results for µ/rho for the case(s) of

5keV (0.005MeV) ; 7,5keV (0.0075MeV) and 10keV (0.01MeV).

Best regards

G.M.