What is the difference between Random Dopant Distribution and Random Discrete Dopants? (RDD is one of the main sources of process variation in CMOS)

Amirali Amirsoleimani @Amirali-Amirsoleimani-2

27 March 2013 1 8K Report

Process Variation issues for CMOS

RDD stands for Random Discrete Dopants Distribution. these two above mentioned are the same expression. As Line edge roughness (LER) and Oxide Thickness Fluctuation (OTF) RDD is the another main sources of the process variation in CMOS.

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