Different apparatus exist to measure thin film conductivity. It depends a bit on the environment you would like to have.
For low temperature/intermediate temperature, the system from nextron (Korea) is rather well built (since contacts can be located carefully under microscope):
http://www.nextron.co.kr/
Linkam proposes a cheaper system but our experience is that it is almost impossible to use easily (contacts impossible to locate correctly).
Norecs from norway also proposes some option connected to its now very famous probostat: www.norecs.com