In case of defect related PL and also to check what could be the various possiblities for quenching of PL.
Depends on the what level of defect, beside previous suggestion, micre-RAMAN. XPS, and may be Micro PIXE, SAD... just to mention few.
I think you will see it in the optical prperties of your film, so you can use spectroscopic ellipsometry and make a patterned scan or if you need a micron resolution you can use imaging ellipsometry where you can map the layer.
Best regards
Christian
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