What is the best way to check the defect density of thin films of nc-Si in SiOx matrix in an area of 1.5 x 1.5 cm2 ?

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Mangal S Dhoubhadel

Depends on the what level of defect, beside previous suggestion, micre-RAMAN. XPS, and may be Micro PIXE, SAD... just to mention few.

Christian Röling

I think you will see it in the optical prperties of your film, so you can use spectroscopic ellipsometry and make a patterned scan or if you need a micron resolution you can use imaging ellipsometry where you can map the layer.

Best regards

Christian