As you know, there are several methods to achieve crystallite size, lattice strain and consequently dislocation density. (Scherrer, Williamson-Hall, Warren-Averbach, Rietvield and ...). Which one is the best method for my opinion?
If your data is powder or bulk Rietvield refinement method will be the best, as it will cover all corrections in the refinement fitting. Modified W-H and W-A methods are also gives accurate results.
for thin films Modified W-H and W-A methods are suitable.
The XRD method is used to analyze structure parameters such as microstrain, crystallite size and dislocation density. The knowledge of such parameters especially
for new materials is important prior to their technical applications. XRD analysis is also employed to identify details about phase compositions, crystal preferred orientations and crystal defect concentrations.
Stokes deconvolution method combined with the Warrene Averbach analysis, which are based on the XRD broadened line analysis are the most rigorous and unbiased approach to obtain the true specimen broadened profile and related microstructural parameter.
The approximation method was also useful in determining microscopic parameters of crystallite size and microstrain.