Dear Sir or Madam

I simulated a 3D PIN photodiode in SILVACO ATLAS. It stops in "material" and has an error: " Memory allocation failure. Try killing processes or see system administrator".

There is no problem in the previous sections and 3D plot is obtained completely, but it gives an error by adding the "material" command.

I defined a minimum set of parameters that had to be defined for Silicon material as follows:

(material material=silicon EG300=1.08 NC300=2.8e19 NV300=1.04e19 permittivity=11.8 MUN=1000 MUP=500 taun=1e-7 taup=1e-7 AUGN=8.3e-32 AUGP=1.8e-31)

How can I solve this problem?

I would be happy if someone could give me some advice.