I am trying to coat metal oxides such as SiOx over PET and PC using PECVD method so can anyone tell me advantage of the coaxial electrode PECVD in comparison to the microwave assisted PECVD?
if you can tell me what the coaxial electrode is? and what the microwave PECVD looks like.
there are plenty of different microwave plasma sources...
mostly the working pressure will make the main difference (in which plasma density regime the pecvd runs)
Hochrateabscheidung mit einem Mikrowellenplasma
Mit Duo-Plasmaline abgeschiedenes Siliziumoxid verleiht Polycarbonat die Kratzfestigkeit von Glas
Stefan Merli1,*,
Dr. Andreas Schulz1,
Dr. Matthias Walker1,
Prof. Dr. Ulrich Stroth2 and
Prof. Dr. Thomas Hirth1
Article first published online: 2 APR 2013
DOI: 10.1002/vipr.201300513
in german for what I mean is the coaxial arrangement?
- Badges
- Science topic
- Similar topics
- Engineering
- Materials Engineering
- Coating