11 November 2015 14 5K Report

XRR, X-ray Reflectivity or Reflectometry, is a NDE in situ method used to determine thin film dimensions and surface "flatness" for nearly a century now.

What is the typical surface examination depth that is involved in such measurements? How "depth sensitive" is this method?

Prior literature references would be deeply appreciated besides your expert comments.

Attached below is video example of real time 2D XRR data from the well known NIST 2000 SRM (standard reference material) and a Platinum thin film on a Si (001) substrate.

Thanx a million in advance!

https://www.youtube.com/watch?v=Uxc2RHliwBI

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