What are some of the best interconnect layers for liner application?

08 August 2022 1 9K Report

I am trying to understand what are the best metal contact liner candidates in the MOL. Also trying to get a sense of delta between PVD and CVD in terms of props, control, economics, etc.

Barry Arkles

There is a strong trend to use cobalt more broadly including MOL. Attached is a recent review on cobalt CVD and ALD.

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