What I want to know is AFM reveals dislocations as hexagonal etch pits, HRXRD also gives an estimation of TDDs by rocking curve broadening etc, TEM also gives an idea about it. Electron channeling contrast imaging also gives an idea by the behavior of back scattered electrons. Which of the above techniques can give an estimate of nearly accurate no of  TDDs and give an accurate differentiation of screw, edge and mixed dislocations ? Thank you before hand.

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