There are methods to find out Threading dislocation densities in III-Nitrides namely AFM,HRXRD,TEM,ECCI,EBSD etc. Which technique is best among all?

What I want to know is AFM reveals dislocations as hexagonal etch pits, HRXRD also gives an estimation of TDDs by rocking curve broadening etc, TEM also gives an idea about it. Electron channeling...

02 December 2014 7,080 5 View