Hello,

I am currently using TCAD Sentaurus to make MONOS structure to find the stress-related problem.

I wanted to change the gate material to Molybdenum from Tungsten.

Since Sentaurus has the material parameter for Molybdenum, I just copied it to my simulation folder.

With having the same process, I only change the gate material to Molybdenum in my SProcess command file.

Then, I ran the simulation, and it didn't work by saying

------------------------------------------------------------------------------------

cannot find Molybdenum Mechanics, suggestion/s:

While executing

"# compiled --no source code available

error "called a copy of a compiled script""

(procedure "pdbset" line1)

invoked from within

"pdbSet Molybdenum Mechanics BulkModulus [Enu2k 320E10 0.31]"

----------------------------------------------------------------------------------------

The simulation did work with Tungsten gate, but I have no idea why it didn't work with Molybdenum gate.

Thank you everyone