Are there any Textbooks for getting a complete understanding about thin film deposition techniques, vacuum technology and their applications(I mean from history to current trends)
Hi Aravind,
You can refer the following books/ journals for thin-film deposition techniques and their various parameters.
Physical and Chemical Methods for Thin-Film Deposition and Epitaxial Growth by John R. Arthur
Regards,
Further to Mansoor's suggestion, try:
Milton Ohring - "The Materials Science of Thin Films".
Kind regards,
Jules
Thin Film Processes I and II by Vossen and Kern
Thank you so much for providing very nice references.
I recommend you the "Thin-Film deposition: Principles and Practice" by Donald Smith
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