Why do all the metal oxides (amorphous) deposited by ALD have the same phenomenon?
(not considering the temperature effect here)
They all have lower refractive indexes with thinner films(fewer cycles) and refractive indexes increase with the thickness(still amorphous).
Does ALD have some imperfect mechanism in the early deposition process, or is it the nature of metal oxides?
How do we explain this phenomenon?
Thank you for answering my question.
Dear Irene Yang . See the following useful RG links: Article The impact of thickness and thermal annealing on refractive ...
https://aip.scitation.org/doi/10.1063/1.5079987?af=R
https://arxiv.org/pdf/1812.02382#:~:text=1b%2C%20the%20relationship%20between,oxide%20in%20previous%20studies16%2C20.
https://oxides.net.technion.ac.il/files/2020/02/2019_JAP_thickness_dependence_ALD-Al2O3.pdf
https://iopscience.iop.org/article/10.1088/0957-4484/26/43/434002/meta
Kindly see also the following useful RG links: Article Structural and Optical Properties of Amorphous Al 2 O 3 Thin...
Article Impact of Atomic Layer Deposition to Nanophotonic Structures...
http://journal.mrs-k.or.kr/journal/article.php?code=44128
Article Progress and future directions for atomic layer deposition a...
Please have a look:
Article Evolution of microstructure and related optical properties o...
Dear Aref Wazwaz, Fawaz Raad Jarullah
, Malgorzata Szczerska thank you for those links.I've already read all of them, but they all say about the effects of temperature change or amorphous-to-crystalline transition.
However, my measurement result says that HfO2 thin film under 60C(constant) is amorphous below 20nm, and somehow the refractive index(measured by SE) increases with increasing thickness obviously.
So I assume that it's not because of the heat energy transferring or the amorphous-to-crystalline transition.
But I'm not sure whether the early deposited process does not deposit densely and causes lower density. And after 20nm they just become higher density and almost have the same refractive index.
Please tell me if you have any idea, it has confused me for 2 months.
Again I appreciated all your help.
- Badges
- Science topic
- Similar topics
- Biological Science
- Bioecology
- Systems Ecology
- Landscape Ecology
- Connectivity