If you want to do a classical stoichiometry measurement by integrating individual peaks, look here starting on page 67: http://uhv.cheme.cmu.edu/manuals/M470101.pdf
If you want to deconvolute an individual component, the CasaXPS manual is a good starter even if you use a different fitting software:
If you need information about which peak is best to use for what element and which precautions with respect to lineshape need to be obeyed, please look in the Thermo Fisher learning center:
If you want to deconvolute an individual component, a simple way to use origin software involves Gaussian fit. That is enough to publish. If you want to know the clear details, kindly go through my following paper. "Facile Homemade Spray Pyrolyzed (SnO2)1‑x(CeO2)x Composite Thin Films for Visible Light Photocatalysis Application".