I'm working at PDMS spin coating.
My protocol is A and B mix with ratio of 10:1,
then dilute with xylene 3/4.
After degasing 30 minutes, I spin coat with 3000 rpm in 40 seconds on coverslides(after sonicator).
After that, usually I should get a flat and smooth surface of PDMS coat on it.
However, there are always some particles( look like dusk but shouldn't be) on it.
This make me often fail at bonding PDMS spin coat with my chip.
I am wondering how can I get rid of these particles.
Thanks.
Alan F Rawle
Alfie Sung Carry out the procedure in a clean room under a Class 100 hood. Filter all solutions to 0.02 microns or better. Clean the substrate thoroughly (search on RG for good protocols - I posted such a protocol a few years ago).
0 votes
0 thanks
- Badges
- Science topic
- Similar topics
- Physical Sciences
- Materials Science
More Alfie Sung's questions See All
Similar questions and discussions