Thank you for the update @ Athique Ahmed but I am searching for physical vapor deposition proces but not chemical process. The paper what you have shared is chemical process.
If you want PVD, consider reactive sputtering, so use a Co-doped Cu target assuming you find a provider selling that and sputter with and Ar/O2 plasma. Please be aware, however, that electronic grade materials are very hard to achieve in sputtering [not impossible, though], but I mean, there's no guarantee that science works out in the intended way.
thank you for the information. Actually, in literature the copper oxide (either Cu2O or CuO) is always a p-type but in my case the the undoped copper oxide film which i deposit using E-beam evaporation is forming n-type nature measured using hall effect.
Thank You for answering my query. Yes, I am doing the same process you have mentioned. I take Cu2O n-type as a source and deposited it. Further, anneal the films but still getting the n-type conductivity.