You can scan the solid samples with a size up to 200-300 mm diameter, and with a thickness up to 25-30 mm. (some optical profilometers these numbers may increase) generally, so yes it is possible.
As an example of a commonly used stylus type profilometer, Veeco Dektak 8 Profilometer have these capabilities, which I found on the net:
-Maximum sample size: approx. 15mm x 15mm (min) up to 200mm (max)