Multilayer coatings are for hard X-rays. In EUV they are used I understand as normal incidence mirrors. Is a multilayer normal incidence mirror possible in soft X-rays (0.1-2 keV) as well?
yes, you can use for instance Mo/Si multilayers or other material combinations also for high-reflecting soft x-ray mirrors. For different x-ray energies only the layer thicknesses have to be adjusted. with best regards. u.k.
Thank you. I am trying to use XOP (IMD) ray tracing codes to design a soft X-ray mirror for the 0.3-2 keV range. Could you please comment on this? Are there better design s/w?
we also use IMD for simulating the multilayer XRR intensities. It works well for characterization of single layer thicknesses, periods, interface roughnesses and densities. with bext regards, uk
There are several programs you could use to calculate and design multilayer relectivity for your needs. But IMD is certainly the best program regarding accessability and quality. Redarding your question, I do not think a normal incidence mirror will work for soft xrays. but grazing incidence would work. depending of the photon energie relatively steep angles could be achieved.
I have seen papers where there could be normal incidence mirrors in the very soft X-rays. Do not know if it works in the range 0.3-2 keV. For example
http://www.nature.com/nature/journal/v294/n5840/abs/294429a0.html
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