Is there an optimum thickness for the poly-Si layer of a poly-Si thin-film-transistor?

Konstantina Saranti @Konstantina-Saranti

24 October 2013 1 7K Report

It seems that there is an upper limit of 100 nm thickness due to grain boundaries. Are you aware of any study or papers relevant? Thank you in advance.

Konstantina Saranti

Dear Narayanan,

Thanks for trying to answer. Probably my question was not clear enough.

I am looking on the influence of poly-Si film thickness on the poly-Si TFT performance.

Hence which is the film thickness which will have as a result a better TFT (i.e higher mobility)

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