I have seen in many studies, oxygen is used as the plasma gas source to produce ozone in the plasma chamber. But my first question is, are there any advantages if ozone is directly used as the input gas instead of generating it by exposing oxygen to plasma?
And the second question is, if ozone is directly used as the input gas with a neutral carrier gas like argon, creation of reactive oxygen species such as oxygen radicals will be enhanced compared to when Ar/O2 is used?
Dear Afsaneh Zarei I am not sure about the plasma production or reactivity when using ozone as input gas, but I have a major concern, ozone is toxic to humans and can be harmful if inhaled in high concentrations. Working with ozone requires careful handling, appropriate ventilation, and protective equipment to ensure the safety of researchers.
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