The maximum Al layer thickness my evaporator can produce is 0.6um. I would like to have an Aluminum layer thickness of about 5um. I am concerned about adhesion issues.
I do not recommend doing metallization over and over to increase the thickness because of quick formation of Al2O3, that is practically unavoidable (unless you in situ cleaning). You can also expect contamination if you are not carrying this process in a Clean room.
Besides trying larger boats, you may also try to hang a fixture that brings your substrate closer to the source (boat). However, this works if the substrate size is smaller. Also, thickness uniformity may be a concern. You may check out from chapter 3 of Materials science of thin films: Deposition and structure (by M. Ohring, 2nd edition, ISBN: 978-0-12-524975-1, Academic Press, 2002) the kind of non-uniformity that you may expect.
Finally, if you are concerned only about adhesion issue and you have free access to an evaporator, try once. Al is cheap. Whether Al2O3 affects or not may be decided only by your application.
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