Is it possible to selectively etch aluminium without affecting aluminium nitride?

05 May 2014 1 5K Report

We want to selectively etch aluminum contacts. The underlying layer is aluminium nitride. How can we ensure that it is not etched? Is it possible the other way round?

Hulya Demiryont

AlN is a dielectric; transparent and highly resistive, but Al is metal; conductive and reflective. If you etch carefully the surface of Al sheet resistance of the surface start to increase, so you will know you are clos4e to interface.

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