I have been using powerpoint for drawing the process steps of semiconductor device fabrication, for devices like MOSFET or even MEMS devices. It appears to be very cumbersome and crude. They cannot be drawn to scale and there are asymmetries. Which software would you recommend to be used for this purpose? I especially want to use the figures drawn in my presentations. Can the same figure be used in research publications? I am talking in terms of 2D i.e. either the front view or the top view of device fabrication steps. I am not so proficient with Latex and Linux.

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