Based on our studies over the AFM results for AZO thin films, we observed some areas which can be related to grains (Fig 2). However, their diameter is in order of 500nm and it seems illogical, because the thickness’ of the AZO thin films is under 100nm.

Is it possible to have aspherical grains with the diameter greater than 500 nm for the thin film which its thickness is lower than 100nm?

If it is possible, how would it be?

If it is not possible, what is the highlighted area in the picture?

Some additional information's which would be helpful:

1. These grains shapes are not spherical and they seem to be kind of planar and these grains had orientation growth direction as shown in the picture (Fig 1).

2. The vertical axis on AFM results scale is lower than 20 nm (Fig 1).

3. Crystal sizes achieved from Scherrer formula, were between 5-10 nm.

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