During deposition with electron beam PVD, the energetic beam only falls at a particular point inside the crucible and digs a hole, so the risk of the crucible and other accessories may occur. So is there any method or trick to guide the beam to fall uniformly or equally distributed on the material?
Some e-beam evaporators have deflection plates after the acceleration plate. By applying alternated voltages onto these plates one can raster the e-beam over the crucible area by changing the impact point in time. That way one can prevent the burn in at a single point.
Karsten
Thanks Dr. Karsten Fleischer, I did the same, changed the impact of the pattern, now it is working fine and the rate is also better.
The e-beam evaporator I used employed a water-cooled copper hearth with a replaceable copper insert. With the evaporator pointing vertically we redesigned the copper insert to have a taper, that way the molten niobium bead remained centred on the e-beam. This worked very well and made very efficient use of our niobium.
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