Is it possible to do Plasma Oxidation of graphene without CVD technique? Can we do directly do plasma treatment of oxygen on graphene power form? How can I understand the techniques of plasma oxidation of graphene?
Plasma Enhanced Atomic Layer Deposition is another technique except Chemical Vapor Deposition there are also some oxygen plasma treatments and methods like plasma etching that you can find them in below papers:
Article Preparation of graphene oxide and characterisation using ele...
Article Making Graphene Luminescent by Oxygen Plasma Treatment
https://iopscience.iop.org/article/10.1088/1361-6528/aa60ef/meta
Article Tailoring properties of reduced graphene oxide by oxygen pla...
Article A Method for Fabrication of Graphene Oxide Nanoribbons from ...
Sure, any source of atomic oxygen will lead to an oxidation. That can be a plasma source for a moderately harsh oxidation [still not as harsh as wet chemistry, though] in which you will also have oxygen ions impinging on the surface, but you can deflect those by applying a bias to the substrate.
For "softer" atomic oxidation you can use a filament-based tube, i.e. you direct a very small flux of oxygen [resulting chamber pressure
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