In which solvent does Pt3Si alloy dissolve?

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Carlos Araújo Queiroz

Triplatinum silicide (Pt3Si) can be dissolved (or etched) with a mixture of aqua regia with hydrofluoric acid (approx. 2:1 v/v).

Possibly helpful patent reference:

H.E. Rhodes (Eastman Kodak Company), "Method of providing a pattern conductive platinum silicide", United States Patent, 4,804,438, Feb. 14, 1989.