In EFM measurement, we get topography and Phase image. From phase image what we can conclude?
Let say, with thickness of a nanosheet phase is increasing. What does it mean that with thickness Capacitance is increasing or decreasing?
Nicolas F. Martinez
dear Sovanlal Mondal
phase in EFM is related with electrostatic interaction. However sometimes is difficult to find an analytic formula that correlates capacitance and phase to extract further conclusions
https://pubs.aip.org/aip/jap/article/134/5/055301/2905121/Dielectric-constant-measurement-sensitivity-in
For that I would recommend other techniques like HD- KFM or scanning microwave.
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