XPS technology is depended on Moseley's Law and if you can distinguish the signal originating from vacuum pump line you will be able to identify the signal originated from your carbon substrate relate to C1s
Dear Prof Sabyasachi...Thanks for your respond on my question...I think the use of residual gases analyser could be the best solution to distinguish the origination of that carbon species...but I am thinking, it is possible for this C1s sp3(graphite) to change to C1s sp2(graphene) under longer period of ion sputtered.
Sorry, I could not understand your hybridization scheme . Be it graphite or graphene both possess honeycomb structure with carbon hexagon with sp2 hybridization. For graphite it is the van der wall forces that connect the layers of graphene to create graphite but still possessing sp2 hybridization. It is only if there is some oxidation then sp3 comes into the scene where one can think that some graphene oxide is formed.