I am planning to use SU-8 on top of borofloat and Si wafers and I will be doing 10 hours immersion of those substrate into IPA solvents for my SAM treatment process. Does the SU - 8 will survive ?
I am not sure if it will make a difference or not, but are you talking about cured SU-8 or uncured one? I once put cured SU-8 under acetone for aa couple of hours, the cured SU-8 survived very well. As far as I know, IPA has less effect on the SU-8, so it should survive. Can't you try a small dummy sample?