I want to do dopant mapping in Si using Fano*Gauss function. Can anybody help me to write the function for it?

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Kyriaki Tsirka

Hello Ankit,

I think you can find your answer under this link:

https://terpconnect.umd.edu/~toh/spectrum/functions.html#Peak_shape_functions

S. Jaziri

I can help you . Please your email I will send you the solution

Friedemann Heinz

The doping density can be mapped expointing Fano resonances. E.g. in

https://doi.org/10.1063/1.3236571

Eqn. (8) describes the fit function.

Ankit Goyal

@ Dr. Jaziri

[email protected]