I have patterned the PMMA on SiO2 (4um) using BEL. Then the ICPRIE is done to transfer the pattern to oxide layer. But, the PMMA stripping is not happening, even though I have not performed any postbake or hardbake. I have tried with acetone boiling at 150deg C and also Plasma O2.

Is there any other solution to strip the PMMA ??

More Pranita Swain's questions See All
Similar questions and discussions