I have deposited CuS thin film on glass substrate and recorded the XRR spectrum. I herewith attached the image of the spectrum. Could anyone suggest me how to calculate the film thickness and interface roughness using the recorded XRR spectrum?
Hello Nirman:
You should fit the curve with some software. I used Parrat32, where you need to work on the date to carry out the fitting. If you are planning to use Parrat, I can help you giving more tips about how to proceed.
Hello
You can try to fit your layer parameters using the IMD software by David Windt. In principle its a free software. If your layers are very thin (in the 1 nm range) you can also try X-ray fluorescence to determine/cross check your thickness.
Hello Nirman:
You should fit the curve with some software. I used Parrat32, where you need to work on the date to carry out the fitting. If you are planning to use Parrat, I can help you giving more tips about how to proceed.
For a fit, you need the X-ray energy, and of course you should have some visible oscillations at higher incidence (and exit) angles, otherwise it is hard to get reliable results. So I would propose to present the data in logarithmic scale (which is mostly used in the literature). For a rough estimation of the thickness, you may use the following simple equation, simply by using the positions of the minima and maxima in the reflectivity curve (hey - this is not a spectrum as the energy is fixed!).
If you neglect the refraction of the beam, then the angular distance DELTA_Theta between minima (or maxima) is given by
Delta_Theta = lambda (X-ray wavelength) / 2 t (t=thickness)
In order to have some more precise thickness determination, you should have more than one or two reflectivity maxima in your data... But as Claudia and Philipp mentioned, a full fit using IMD or Parratt is preferred!
Good luck, Dirk
Dear Dr. Claudia,
I am willing to learn how to use parrot software for the analysis of X-ray reflectivity spectrum. Could you help me to use the software? Here is my mail id: [email protected].
Hello Nirmal:
No problem, I hope my experience will be useful for you. I'll contact you at your e-mail
Also , you could use X-Ray Calc software for fitiing. It is more user-friendly than IMD. 14-day trial should be enough for you
http://sci-progs.com/index.php?page=features
I also recommend the IMD software, which gives nice results especially for the film thickness and interface/surface roughness.
Dear Claudia,
I am also willing to learn parratt32. I would be highly obliged if you would help me to use this software. My email ID is [email protected]
Hello Razia: I´ll contact you by email. I just now read your message.
Hi, can anybody help us to calculate SiO2 and TiO2 films thickness prepared on the glass substrates. The XRR data files are attached herewith?
Thanks in advance.
R S Dubey
@ Raghvendra - a fit without knowing anything about X-ray energy etc is not feasible. What about the used X-ray optics? If you give some input, a fit should be possible. Regards, Dirk
Dear Dr. Dirk,
Thanks for the positive and prompt response.
I'll mail with details, could you please give your email ID?
Rgds,
RSD
Got Bruker LEPTOS? See example for NIST 2000 Standard Reference Material specimen:
https://www.researchgate.net/post/What_depths_can_one_typically_probe_with_XRR_X-ray_Reflectivity_Reflectometery
Nice to see the data. What resolution? What material? What wavelength composition? Etc. :-) Post all the details for the best feedback from RG expertise.
P.S.: There are up to 15 topics that may be included in your question besides the selected 5 up top in the question. Please refer to the question noted below for examples of relevant topics to include in order to get the best circulation and responses from the RG expertise.
https://www.researchgate.net/post/How_do_I_figure_out_the_film_thickness_of_the_individual_layer_spatially_from_these_diffractograms
Hello Claudia,
I would really appreciate if you can help me in learning Parratt software for the XRR data fitting. My email id is [email protected]
If you have any problem with XRR or neutron data fitting, you can download our freeware program which is user friendly. Calculation is made easy by using sliders and then fitting procedures
Dear Prof. Alain,
Could you please provide the source where the software can be downloaded?
Thanks in advance.
Dear Saurabh
Good to hear from you. I hope you are doing well and that you are not affected by the covid pandemy.
You can download the program Reflex at
https://reflex.irdl.fr/Reflex/reflex.html
All the best
Alain
Dear Prof. Alain,
We are fine here. So far we have not affected by COVID pandemy...
I hope situation in Le Mans also is better and not affected by COVID..
Thanks for providing link for software.
Thanking you.
With regards.
The greater the oscillations you notice, the greater the results calculated by fitting, the more accurate. It will be more complicated if there are only one or two oscillations. For a single layer, only the duration of the oscillation period is related to the thickness. You can observe multiple modulation
oscillations when you have multiple samples.
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