How to do Zn diffusion process of GaAs wafer for high power laser diode(HPLD)?
In order to make a HPLD based on GaAs, we are trying to do test Zn diffusion process for p-type doping.
We use the Zn3P2 materials for p-type dopants.
To make Zn diffusion on GaAs wafer, what sort of method is better for the thermal process of Zn diffusion on GaAs?
RTA? Or tube furnace?
What is the thermal process condition of Zn diffusion on GaAs?
450C, 500C temperature? how long? 30 minutes?
It would be helpful for us to get the general information(paper, thesis) about Zn diffusion process of GaAs.