How to do Selective Wet etching between TiN and Si3N4?

Hur Namwook @Hur-Namwook

06 January 2021 0 1K Report

Hello.

I have to do Si3N4 etching which is deposited on the TiN.

In that case, I want to etch Si3N4 with wet etching and stop at TiN layer.

Therefore, I need to find selective etching liquid which is much reactive at Si3N4, not TiN.

Could you advise me about wet etching?

Thanks a lot.

Best regard, NamWook Hur.

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