We have fabricated AACVD system for thin film deposition. We also wanted to include scrubbers in the system to neutralize the byproducts of the reaction. We have tried with bottle kind of scrubber however, the liquids filled in them went into the vacuum pump. So please suggest me the design scrubbers.
Grigory Rudakov
The best way is to contact the experts in this field. Because safety first! My recommendation is a company Centrotherm Clean Solutions. I have such systems and are very satisfied.
http://www.centrotherm-cs.de/en/
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Guilei Wang
Usually we use the burning to burn the byproduct,then using the wet clean to dilute.
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