You can make use of Laser-Induced Plasma (LIP) for this purpose. The method is known as PLD (Pulsed Laser Deposition).
You ablate the target with a pulsed laser and place substrate in front of it. In this way, the target material ablated in the form of plasma deposits on the substrate as a film, thickness and smoothness of which can be modify in several ways.
Plasma should be such as to avoid sputtering of the substrate and obtain a dense and adherent deposit. Normally the pressure is less than the atmospheric pressure and only a small fraction of the gas is ionized to control the deposition conditions. It can be either dc plasma or inductive plasma. The voltages are controlled to obtain a good/desired deposition conditions. Any good book on thin film and coatings can provide you with a great deal of useful information.