Hi Aman

You should try XPS peak 41 software and try to fit the peak using Gaussian fitting after background removal.

After fitting in XPS peak41 you just copy the data and plot it on any software like Origin etc.

Or it is better if you should try the standard sample and compare your samples with that reference one, it would help you.

Thanks with regards

Sahil Dani

You need to compare the position of the binding energies in the O 1s region for different samples, if you observe a shift in their binding energies, it means that their chemical environment might be different. Also, you need to use the peak areas of O1s for different samples, to calculate the percentage of Oxygene and see how much the contribution of Oxygene in the samples are different.

I see two scenarios here for you:

• You use the same basic material, but you oxidize it differently. In that case I recommend normalizing you spectrum to the integral of the base material peak, i.e. the background subtracted base material peak should have the same area after the normalization.
• You want to analyze the relative intensities of O1s species, but the starting materials were different. In that case I would simply recommend normalizing the background subtracted O1s peak to 1 because then you component integrals will be percentages, directly.

In both cases, please report accurately what you have done to your data or you will hamper reproducibility.

Dear Sahil Dani Jürgen Weippert Mahsa Shekarnoush ,

I would like to thank you all for your response. I tried the method suggested by Jürgen Weippert , it works for me.

Thank you again

Dear Scien Tist,

The binding energy of your Ba 3d_5/2 peak is way too high with 808 eV. Either someone really messed up the calibration of your system, or, what I think is more likely, your material is not conductive enough and you observe charging. Are the binding energies of other peaks, like O 1s or C 1s, where you would expect them to be?