Any body know that how to clean the Substrates of MgO and Si with onside Polished. There are several method that i know about like put the substrate in Nitrogen environment for long duration, some use IBE cleaning, lithographically cleaning,Lithographically processed but cleaned with a final IBE, chemical etching, and Heat treatment.
But I want some low cost and effective methods which can produce the same as above result as i mention above. please share your opinions and ideas