I am implementing the operation of programming 3D nand. But onlocal mesh 'Tox_channel' contains no nonlocal lines! The phrase appears. How do I solve this?
I attach the command I wrote below.
Physics {
eBarrierTunneling "Tox_channel"
hBarrierTunneling "Tox_channel"
eBarrierTunneling "Box_WL"
hBarrierTunneling "Box_WL"
}
Physics(Material="NitrideAsSemiconductor") {
Traps(
(Donor Level EnergyMid= 2.5 FromConductionBand
Conc= 1e19
eXSection= 1e-13 hXSection= 1e-13
eBarrierTunneling(NonLocal= "Tox_channel" NonLocal= "Box_WL")
hBarrierTunneling(NonLocal= "Tox_channel" NonLocal= "Box_WL")
PooleFrenkel
TrapVolume= 1e-20
)
(Acceptor Level EnergyMid= 1.0 FromConductionBand
Conc= 1e19
eXSection= 1e-13 hXSection= 1e-13
eBarrierTunneling(NonLocal= "Tox_channel" NonLocal= "Box_WL")
hBarrierTunneling(NonLocal= "Tox_channel" NonLocal= "Box_WL")
PooleFrenkel
TrapVolume= 1e-16
)
)
}
Math {
NonLocal "Tox_channel" (
RegionInterface="tunneling_oxide/channel"
Length= 7e-11
Permeation = 7e-9
Digits= 4
EnergyResolution= 1e-4
)
NonLocal "Box_WL" (
MaterialInterface="Oxide/Tungsten"
Length= 7e-11
Permeation = 7e-9
Digits= 4
EnergyResolution= 1e-4
)
* CNormPrint
Iterations= 25
Transient= BE
}