For icp plasma, we used the oscilloscope to measure the voltage and current of the coil. Are these values including the voltage and current of plasma or just only the coil (according to the transformer model) thanks
By measuring the voltage and current of an ICP with the help of oscilloscope, one can have a rough idea about the discharge condition of the plasma. But for measuring ion current and plasma potential you have to use Langmour's Probe, low current measuring meter and DC power supply.
In presence of plasma, when you measure the voltage and current you will get the discharge characteristics at diffrent operating condition.
You can measure the self bias voltage directly from the RF power supply (that is measured across the blocking capacitor of matching network).
You can measure the floting potential using a capacitive probe or langmuir probe directly using the multimeter.
In RF plasmas (ICP in your case), you can measure the plasma parameters like electron temperature, plasma density, plasma potential, EEDF using the Langmuir probe. However, due to RF environment you have to use RF comensated Langmuir Probe to measure plasma parameters.
To measure electric field you have to use E-field (capacitive) probe.
You may have a look at literature. Good luck.
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