The adventitious carbon located at 284.8 eV was used to calibrate the XPS raw data, which is an essential procedure before spectra analysis.

However, in the chemistry depth profile analysis, carbon features are nearly depleted after Ar+ etching treatment, so that the conventional energy scale calibration of XPS spectra using the adventitious carbon peak cannot be applied.

I found some investigations concluding that other elements, that specimen contains by itself, can be regarded as an internal standard for calibration [Li, Jerry Pui Ho, et al. Physical Chemistry Chemical Physics 21.40 (2019): 22351-22358.]. While I'm not sure whether this treatment is universally recommended?

My question is that could I use the adventitious carbon in a shallow depth to calibrate all the XPS spectra, including those which carbon signal (1Cs) is too weak to distinguish.

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