How to apply tunnel mesh In a Gate-All-Around (GAA)Tunnel FET in ATLAS TCAD?

19 July 2023 1 3K Report

If no tunneling mesh is applied separately in the GAA TFET structure, what values of A_kane and B_kane should be taken in the ATLAS TCAD tool?

Ahmed Shaker

you can apply the nonlocal band to band tunneling model for GAA TFET.

However, you have to define the structure by using cylindrical mesh. That way, the structure will seem as a 2D device. There is an example in the quantum folder. It is called: GAA TFET.

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