I want to shape my Nb or NbO2 thin films on glass, mechanical etching by scratching the film with a razor doesn't really remove the material but makes scratches. I want to chemically etch the samples. I have tried using HF, HF has etched the glass beneath the films.
Dear Ali Fakih,
Nb samples were exposed to the microwave glow discharge in a Cl2/Ar mixture in order to establish plasma etching as a viable process for bulk Nb surface preparation.
OR
Etching Method: Electrolytic etching Etchant (Electrolyte) Composition: 60 ml ethanol, 35 ml distilled water, 20 ml glycerin, 10 ml lactic acid, 5 ml H3PO4, 2 g citric acid.
Reference: Vander Voort, Metallography Principles and Practice, McGraw-Hill, Inc., 1986, p. 696.
I have attached research articles to etch Nb and NbO2.
01. https://pdfs.semanticscholar.org/4bdc/9ba5393beed5c8e4d962f02b7688dfa2b8ac.pdf
02. https://agenda.linearcollider.org/event/1807/contributions/4586/attachments/3493/5881/Talk3_Marija_Raskovic_Plasma_etching.pdf
I hope I have answered your question.
With Best Wishes,
Samir G. Pandya
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