How to measure the thickness of few nanometer thin film which is an important data for all calculation in Hall measurement.
x-ray reflectivity, or small angle x-ray scattering (SAXS) is your best bet.
Ellipsometry might give you indirect evidence, although I'm no expert on the matter. Would this be outside the range of a highly sensitive AFM?
x-ray reflectivity, or small angle x-ray scattering (SAXS) is your best bet.
Hello. There is a thread on the topic already. Please check the following link.
https://www.researchgate.net/post/Can_anyone_suggest_a_Profilometer_for_measuring_film_thickness_with_nanometer_resolution
I agree with Erie H Morales - check the discussion performed some time ago. Briefly you can measure the thickness by profilometry (you will need high sensitive equipment for thinner film), by ellipsometry or using transmittance and/or reflectance spectra and non linear curve fitting. If your film is thick enough (let say more than 500 nm), transparent and deposited on non-absorbing substrate with known optical constants you can use Swanepoel's method. Hopefully this help.
I would try with scanning electron microscope. I believe if the film can be wrapped to forma a cylinder, then it can attached on a SEM sample holder.
A highly sensitive AFM may give you a good thickness profile. SEM (Field emission is better). Elliposometry and reflectance measurements would give you indirect measurements, but the problem is that you really need a direct thickness profile if you do not expect your film to be even.
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