I am trying to get the absorbance of TiO2 thin film applying Kubelka- Munk function to the reflectance spectrum however reflectance of Si is high in the UV-VIS region of spectra(200-500nm) and substrate is always thicker than the film(the thickness of the films are ~0.5-1.5 um).

So, may you please recommend a paper/textbook in which this issue was solved? Is it possible to separate the reflectance of the film from the substrate in this case or it is better to use another substrate?

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